PECVD 24 kW / 2450 MHz

Plasma-enhanced chemical vapor deposition PECVD 24 kW

Specifications

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General information
Power
24 kW
Frequency
2450 MHz
Technical data
Operating gas
Ar-CH4
Power supply
SMPS air cooling
Reactor output
Water-cooled flange
Waveguide
WR340
Key Features
Key Features
Key Feature
Key Feature
Key Feature
Key Feature
Key Feature
Abmessungen
Gesamtbreite
mm
Gesamthöhe
mm
Gesamttiefe
mm

Description

Plasma-enhanced chemical vapor deposition PECVD 24 kW

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